Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond[Open Access]
D. Jonker, L. Kooijman, Y. Pordeli, B. van der Wel, E.J.W. Berenschot, B. Borgelink, H. Le The, M. de Boer, J.C.T. Eijkel, R. Hueting, R.M. Tiggelaar, A. van Houselt, H.J.G.E. Gardeniers, and N.R. Tas
IJNT 17, 583–606 (2020) |
