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Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning
Microelectronic Engineering
87
, 1512 – 1515 (
2010
)
Authors
M. Hauptmann
S. Brems
Elisabeth Camerotto
Aaldert Zijlstra
G. Doumen
T. Bearda
Paul W. Mertens
W. Lauriks
BibTeΧ
@article{Hauptmann20101512, title = "Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning ", journal = "Microelectronic Engineering ", volume = "87", number = "5–8", pages = "1512 - 1515", year = "2010", note = "The 35th International Conference on Micro- and Nano-Engineering (MNE) ", issn = "0167-9317", doi = "http://dx.doi.org/10.1016/j.mee.2009.11.061", url = "http://www.sciencedirect.com/science/article/pii/S0167931709007163", author = "M. Hauptmann and S. Brems and E. Camerotto and A. Zijlstra and G. Doumen and T. Bearda and P.W. Mertens and W. Lauriks", keywords = "Single-wafer cleaning", keywords = "Megasonic cleaning", keywords = "Nano-particles removal", keywords = "Acoustic cavitation " }
Original
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