Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles

Journal of Applied Physics 113, 064902 (2013)

Authors

David Fernández Rivas
Joris Betjes
Bram Verhaagen
Wilco Bouwhuis
Ton C. Bor
Detlef Lohse
Han J. G. E. Gardeniers

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AQUA
Max Planck Gesellschaft
4TU Precision Medicine
MCEC
Twente
Centre for Scientific Computing
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